BIN# MULTI-1 MULTI-2 MULTI-3 MULTI-4
Flow -rate 10-30sccm 31-100sccm 101-300sccm 301-1,000sccm
BIN# MULTI-5 MULTI-6 MULTI-7 MULTI-8
Flow -rate 1,001-3,000sccm 3,001-5,000sccm 5,001-10,000sccm 10,000-30,000sccm